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Fujimi Presentation at 2017 CMPUG Spring Meeting




Posted May 11, 2017

Hooi-Sung (Brian) Kim, PhD at Fujimi Corporation presented a study titled, "The Impact of Sample Containers on Large Particle Count for CMP Slurries", at the 2017 CMPUG Spring Meeting. The presentation highlighted the contribution of sample bottle lid liners to increased LPC counts in CMP slurries.

The presentation material can be downloaded here.